The FSKSD-16 miniature electric cylinder excels in precision control and high-strength applications,
making it particularly suitable for automation applications requiring high accuracy and high thrust. Its
main application areas include:
I. Semiconductor Manufacturing
Wafer Handling and Alignment: Through high-precision position control, it ensures the stability and
positioning accuracy of wafers during handling, meeting the micron-level alignment requirements of
photolithography and exposure processes.
Precision Pressing in Packaging Equipment: It applies precise pressure to chips during wire bonding and
encapsulation, preventing damage to the chips or defective packaging.
Precision Execution in Testing Equipment: It precisely controls the movement and contact pressure of
probes, ensuring the stability and accuracy of test data.
II. Industrial Automation
Multi-Workpiece Transfer Device: Multiple small electric cylinders are fixed on an electric slide table to
simultaneously move and load multiple workpieces, improving production efficiency.
Electronic Parts Assembly Device: Using electric grippers with multi-point positioning, it clamps objects
of different sizes for assembly and torque control, preventing damage to parts.
Printed Circuit Board Inkjet Printer: The substrate is fixed on an electric slide table, utilizing the uniform
motion characteristics of the slide table for printing operations on the substrate.
III. Precision Electromechanical Instruments
Photolithography Equipment Adjustment Module: Provides stable linear motion and high-precision con
trol for the optical platform in photolithography machines, ensuring the alignment of the optical system.
Precision Movement in Cleaning Equipment: Adjusts the position and angle of the nozzle to ensure that
the cleaning fluid covers the entire wafer surface.
IV. Other Applications
Electronic Parts Handling Device: When the workpiece is a brittle material (such as electronic parts), the
electric gripper's torque mode is used to avoid damaging the workpiece.
Optical Disc Receiving Device: Utilizing the multi-point positioning characteristics of the electric slide
table, the optical disc receiving box is moved up and down for precise positioning and receiving.
The FSKSD-16 miniature electric cylinder plays a vital role in semiconductor manufacturing, industrial
automation, and precision electromechanical instruments due to its high precision, high thrust, and
compact size.
