CHARACTERISTICS OFTHEDIRECTDRIVE TECHNOLOGY
Faster: Standard speed 2m/s, up to 7m/s. Standard acceleration 1G, up to 5G90-degree reciprocating positioning can easily reach 1200 times/min
More accurate: True "zero backlash" and "full closed loop", easily reach μm-level accuracy Linear standard repeatability ±2μm, up to ±0.1μm and above Rotating standard repeatability ±3 arc seconds, up to ±1 arc second
More stable: "zero transmission chain", no mechanical friction, 365 days maintenance-free, long-term accuracy
Farther: unlimited travel, up to 10 meters or more
Linear motor performance
Repeatability: ±0.5-±1μm.
Module absolute accuracy: ≤10μm/500mm (original factory accuracy).
Maximum length 6M, accept customization of special module length customization.
Single-axis multi-motor motion.
High-speed motion: rated speed 3m/s; peak speed 5m/s.
High acceleration: Depending on the actual application load, it is easy to reach high acceleration of 2G and above.
Module using
3C Automation
Single-axis multi-motor
Extra-long stroke
Loading and unloading/carrying functional components
High-precision loading
The FSKH 82 is a linear motor slide module focused on ultra-high positioning accuracy, designed for
precision applications requiring micron-level repeatability and high-speed response. Its key features and
advantages include:
[Ultra-High Positioning Accuracy and Stability]
Utilizing fully closed-loop control technology, the linear encoder directly detects the slide position,
achieving repeatability of ±1μm and minimizing accuracy degradation over long-term operation. The
ironless linear motor design eliminates cogging and significantly reduces velocity fluctuation (controll
able to within ±1%), ensuring smooth motion.
[Compact Structure and High-Rigidity Support]
Integrated with high-performance HDR-type four-row angular contact ball bearing LM guides, the LM
guide utilizes a four-way equal-load DB structure, maintaining excellent rigidity even under high torque
loads. The compact design supports single-axis installation, facilitating equipment miniaturization and
lightweight upgrades.
[High-Speed Response and Dynamic Performance]
The linear motor's direct drive mechanism achieves millisecond response, a maximum operating speed
of 3m/s, and a maximum acceleration of 5G, significantly improving production efficiency. Its high speed
and acceleration/deceleration capabilities are particularly suitable for short-stroke precision operations,
such as semiconductor inspection and precision assembly.
Flexible adaptability and long-stroke expansion
The modular design supports independent control of multiple slides, allowing multiple actuators to be
configured on the same axis. By connecting the bases, it can easily be expanded to ultra-long strokes
exceeding 4 meters, breaking the length limitations of traditional ball screw drives.
2. Compatibility with mainstream drive communication protocols (such as Mitsubishi SSCNET III/H and
Panasonic EtherCAT) facilitates system integration.
This module is widely used in high-value-added manufacturing scenarios such as precision machine
tool spindle positioning, high-speed electronic component sorting, and high-precision measuring
equipment. Its excellent technical specifications provide a reliable motion control solution for industrial
automation.
The FSKH 82 is a high-performance linear motor slide module with the following core features:
Ultra-High Positioning Accuracy: The ironless linear motor design eliminates cogging effects. Combined
with fully closed-loop control using a linear encoder, it achieves exceptional repeatability, reaching
±1μm.
Low Speed Fluctuation: The ironless structure effectively suppresses speed fluctuations, ensuring smooth
and precise motion, with fluctuations controlled to within ±1%.
High Speed and High Response: The linear motor directly converts electromagnetic force into linear
motion, supporting operating speeds up to 3m/s and accelerations up to 5G, significantly improving
production efficiency.
Compact and Rigid Design: The integrated single-axis HDR-type high-rigidity LM rolling guide (four
-point contact ball bearing DB structure) provides excellent torque load resistance in a compact and
lightweight design, making it suitable for high-precision applications in space-constrained environments.
Stability and Reliability: Compared to ball screw drives, linear motors are less susceptible to accuracy
degradation and offer superior long-term operational stability.
Wide compatibility: Supports multiple communication protocols (pulse, SSCNET III/H, EtherCAT) of
mainstream brand drives (such as Mitsubishi, Panasonic, and High-Creation), simplifying system integ
ration.
The FSKH 82 is a high-precision positioning module driven by a linear motor, designed for industrial
applications requiring micron-level repeatability. Its core features include:
Drive Principle: Direct drive using an ironless linear motor eliminates mechanical backlash and keeps
speed fluctuation within ±1%.
Accuracy: Combined with a fully closed-loop optical encoder, it achieves repeatability of ±3μm (±5μm
for a magnetic encoder).
Load Capacity: The dual-guide design supports a horizontal load of 15kg and a continuous thrust of
98N (peak 392N).
Stroke Configuration: Customizable effective strokes range from 60-1800mm, with a maximum speed
of 3m/s.
Environmental Adaptability: The non-contact design between the mover and stator eliminates mechani
cal wear and significantly extends the lifespan of ball screw modules.
This module is suitable for high-end equipment applications such as semiconductor packaging and
precision testing, where smooth motion and positioning accuracy are crucial.
Core Features
High Repeatability
Using ironless linear motor technology to eliminate cogging, this product achieves repeatability of
±1μm. It supports fully closed-loop control and uses a linear encoder to directly detect the slide
position.
High Speed and High Dynamic Response
With a maximum acceleration of 5G and a top speed of 3m/s, it is suitable for precision applications
requiring rapid start and stop (such as 3C automation and semiconductor equipment).
Compact Design
Integrated HDR-type LM rolling guides utilize a four-way equal-load DB structure to achieve high
rigidity and a lightweight structure, making it a viable alternative to traditional ball screw modules.
Drive Compatibility
Compatible with mainstream drive communication protocols from Mitsubishi and Panasonic (such
as EtherCAT and pulse input), it facilitates integration into industrial control systems.
Typical Applications
Precision manufacturing: Semiconductor packaging and PCB inspection equipment (requiring micron
-level positioning).
Automated production lines: Material sorting and high-precision spray coating (relying on high-speed
stability).
Research instruments: Optical stage fine-tuning and biological sample positioning.
Core Features
Nano-level Positioning: Utilizes fully closed-loop linear encoder control, achieving repeatability of
±0.1μm, suitable for high-precision applications such as semiconductor testing equipment.
Magnetic Levitation Drive: An ironless linear motor design eliminates cogging and keeps speed
fluctuation within ±0.5%.
Compound Guide System: Combining HDR-type LM rolling guides with air bearings, the system
achieves axial stiffness of 500N/μm.
Key Technical Parameters
Indicators Performance Parameters Comparison Standard (FSKH 60)
Maximum Acceleration: 5G (with counterweight ≤ 5kg) 2G
Effective Travel: 0.5-3m (supports magnetic track splicing up to 15m 60m (with ±0.01mm accuracy)
Environmental Compatibility: Cleanroom Class 100 / Vacuum 10^-3 Pa IP54 protection
Industry Application Advantages
Wafer Lithography: Combined with a laser interferometer, it achieves submicron synchronization error,
meeting the requirements of 28nm process equipment.
Medical Microscopy: Vibration frequency <0.01Hz (ISO 1940 G0.4 balance standard).
Multi-Axis Collaboration: Controlled via EtherCAT, supports 32-axis synchronization (clock jitter <1μs).
Selection Recommendations
For loads >20kg, the optional CCD real-time deformation compensation system is recommended to
reduce guideway runout error by 30%. The modular design allows for quick replacement of actuator
units, with a mean time to repair (MTTR) of <15 minutes.
