Semi-enclosed High Speed Linear Motor Module Slide

CHARACTERISTICS OFTHEDIRECTDRIVE TECHNOLOGY

Faster: Standard speed 2m/s, up to 7m/s. Standard acceleration 1G, up to 5G90-degree reciprocating positioning can easily reach 1200 times/min

More accurate: True "zero backlash" and "full closed loop", easily reach μm-level accuracy Linear standard repeatability ±2μm, up to ±0.1μm and above Rotating standard repeatability ±3 arc seconds, up to ±1 arc second

More stable: "zero transmission chain", no mechanical friction, 365 days maintenance-free, long-term accuracy

Farther: unlimited travel, up to 10 meters or more

Linear motor performance

Repeatability: ±0.5-±1μm.

Module absolute accuracy: ≤10μm/500mm (original factory accuracy).

Maximum length 6M, accept customization of special module length customization.

Single-axis multi-motor motion.

High-speed motion: rated speed 3m/s; peak speed 5m/s.

High acceleration: Depending on the actual application load, it is easy to reach high acceleration of 2G and above.

Module using

3C Automation

Single-axis multi-motor

Extra-long stroke

Loading and unloading/carrying functional components

High-precision loading

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Experience unmatched precision and speed with the FSKH 170, a semi-enclosed high-speed linear motor modular slide. This compact yet powerful linear drive motor is engineered for critical applications demanding both rapid movement and pinpoint accuracy.

The FSKH 170 stands out with its exceptionally short installation length relative to stroke, allowing for direct mounting of loads and equipment right onto the slide. This streamlines integration and reduces overall footprint. Moreover, it supports a variety of cushioning mechanisms—elastic, pneumatic, or hydraulic—ensuring quick adjustment for optimized operational stability in any setup.

Harnessing the inherent advantages of a linear electric motor, the FSKH 170 delivers high-speed movement, exceptional responsiveness, and long-term stability. This makes our linear motor an ideal choice for high-stakes applications such as precision machine tools, laser cutting systems, and advanced industrial automation equipment, consistently meeting the most stringent precision requirements.

Furthermore, its robust semi-enclosed design significantly enhances protection and reliability. This makes the linear electromagnetic motor slide particularly suitable for demanding, high-precision manufacturing environments, effectively expanding its application range to where cleanliness and component safety are paramount.

The FSKH 170 linear drive motor is a compact solution for high-speed automation. Its key features include:

• Direct Load Integration: Simplified mounting of loads and devices directly onto the slide.

• Versatile Cushioning: Options for elastic, pneumatic, or hydraulic configurations to absorb impacts and ensure smooth, reliable operation.

• Enhanced Accessibility: All critical settings—including end-position adjustment, proximity switch positioning, and mounting—are conveniently accessible from one side, significantly easing maintenance and setup.

• Robust Sealing System: Features cover strips and sealing bands to effectively protect internal components from contaminants, extending the lifespan of your linear electric motor.

• Food-Zone Compatibility: An optional NSF-H1 lubricant offers limited suitability for food-zone environments, although full certification may require additional considerations.

For a broader range of automation tasks, the FSKH 170 linear motor supports diverse needs with its high-speed capabilities and adaptable design, truly showcasing the power of a modern linear drive motor.

The Semi-enclosed High-Speed Linear Motor Module Slide is a high-dynamic, high-precision linear 

motion actuator primarily used in automation scenarios requiring high speed, high precision, high 

reliability, and a clean environment. The following are its typical application areas:

I. Semiconductor Manufacturing

Photolithography machines: Used for high-speed, high-precision positioning of wafer stages to ensure 

lithography accuracy.

Wafer handling: Enables fast and smooth transfer of wafer cassettes in cleanrooms.

II. CNC Machining

High-speed milling: Used in machining centers requiring high dynamic response to improve processing 

efficiency.

Laser cutting: Achieves high-speed, high-precision motion control of laser cutting heads.

III. Automation Equipment

Robotics: Used for fast and precise positioning of robot arms.

Assembly lines: Enables high-precision assembly on assembly lines in industries such as electronics and 

automotive.

IV. Maglev Trains

High-speed operation: Used in the linear motor drive system of maglev trains for high-speed, low-noise 

operation.

V. Medical Equipment

Surgical robots: Achieves high-precision motion control of surgical instruments in cleanrooms.

Imaging equipment: Used for fast and precise positioning in equipment such as CT and MRI scanners.

VI. Other Fields

3D printing: Used for high-precision, high-speed motion control of print heads.

Packaging machinery: Enables high-speed, high-precision packaging on packaging lines in industries 

such as food and pharmaceuticals.

VII. Summary

The Semi-enclosed High-Speed Linear Motor Module Slide, with its high dynamic performance, high 

precision, low maintenance, and flexibility, has broad application prospects in fields such as semiconduc

tors, CNC machining, automation equipment, maglev trains, and medical equipment.

The semi-enclosed high-speed linear motor module slide is a highly efficient drive device that directly 

converts electrical energy into linear motion. Its core advantages lie in its high speed, high precision, and 

low noise.

It eliminates the intermediate transmission mechanism of traditional lead screws or synchronous belts, 

using a linear motor to directly drive the slide. This eliminates mechanical contact wear and backlash, achi

eving micron-level positioning accuracy and high-speed reciprocating motion exceeding 2 m/s.

Its semi-enclosed structure cleverly balances protection and heat dissipation requirements, effectively prev

enting the intrusion of dust and chips in industrial environments while maintaining good heat dissipation 

channels, ensuring stability under continuous high-speed operation.

This module is widely used in fields with extremely high dynamic response requirements, such as semicon

ductor packaging, precision optical inspection, and automated high-speed sorting. It is a key core compone

nt for improving the production capacity and yield of high-end equipment.

The FSKH 170 linear motor features high thrust, high precision, and rapid response characteristics, making

it ideally suited for applications in precision machining and automation equipment that require long travel

 ranges and high dynamic performance. This model utilizes either a coreless or iron-core design (depending 

on the specific configuration), effectively minimizing speed ripple and enhancing motion smoothness.

**Thrust Performance:** Delivering a maximum thrust of up to 2133 N, it falls within the category of medium

-to-large coreless linear motors, capable of meeting the demands of high-intensity continuous operation.

**Speed and Precision:** It supports a maximum operating speed of 7 m/s, achieves sub-micron-level positio

ning accuracy, and maintains a stable repetitive positioning accuracy within ±0.002 mm—making it suitable

 for highly demanding fields such as semiconductor manufacturing and precision electrical discharge machi

ning (EDM).

**Structural Advantages:** The non-contact drive mechanism minimizes mechanical wear and reduces main

tenance costs; furthermore, the modular magnetic plate design facilitates long-travel extensions, allowing 

for flexible adaptation to various equipment layouts.